Utilization and Measurements of Ferric Oxide thin films as a Nitride Dioxide gas sensor

Abstract

In this work, we investigate and revealed a (NO₂) gas sensing properties of Ferric oxide (Fe₂O₃) thin films prepared using magnetron DC- sputtering technique, using different thicknesses concurring various deposition times. Each film tested with different sample temperature (200, 250 and 300) ^oC in order to enhance gas sensitivity. The results reveal that the sensitivity increase as the film thickness decrease (lower grain size) the film gas sensitivity increases, and the gas sensitivity increase also with increasing the operating temperature.