Design of Low Aberration Electrostatic Lens Operated under Zero Magnification Condition

Abstract

 The inverse problem is important method in the design of electrostatic lenses which is used in this work, with new technique by suggesting  an axial electrostatic potential distribution  using polynomial function ,the paraxial ray equation was solved to obtain the trajectory of the particles that satisfies the suggested  potential function, the Finite-Element Method  (FEM) is used in the solution of Laplace's equation for determine the axial potential .

           The results showed low values of spherical and chromatic aberrations comparing with other searches about( 3.9)  for spherical aberration and(0.24)  of chromatic aberration for   good lens’s design. values of potential of  10