Study of Utilization of Ferric Oxide Thin Films as a Nitrogen Dioxide Gas Sensor

Abstract

In this work, we investigate and synthesis a (NO₂) gas sensing properties of Ferric oxide (Fe₂O₃) thin films are prepared using magnetron DC- sputtering technique, using different thicknesses concurring various deposition times. Each film is tested with different sample temperature (200, 250 and 300) ^oC in order to enhance gas sensitivity. The results reveal that the films sensitivity increases as the film thickness decreases (lower grain size), and the gas sensitivity increases also with the increasing operating temperature